| 000 | 00809nam a2200229 a 4500 | ||
|---|---|---|---|
| 003 | BD-DhUUL | ||
| 005 | 20240828123024.0 | ||
| 008 | 240828s2005 nyua g b 001 0 eng | ||
| 020 | _a0071455566 | ||
| 040 |
_aBD-DhUUL _bEng _cBD-DhUUL _dBD-DhUUL |
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| 082 | 0 | 0 |
_a621.381/046 _223 |
| 100 | 1 |
_aGilleo, Ken. _914250 |
|
| 245 | 1 | 0 |
_aMEMS/MOEMS packaging : _bconcepts, designs, materials, and processes / _cKen Gilleo. |
| 260 |
_aNew York : _bMcGraw-Hill, _cc2005. |
||
| 300 |
_axiii, 220 p. : _bill. ; _c24 cm. |
||
| 440 | 0 |
_aMcGraw-Hill nanoscience and technology series _914251 |
|
| 504 | _aIncludes bibliographical references (p. 203-213) and index. | ||
| 650 | 0 |
_aMicroelectronic packaging. _94301 |
|
| 650 | 0 |
_aMicroelectromechanical systems. _914252 |
|
| 650 | 0 | _aOptoelectronic devices. | |
| 942 |
_2ddc _cBK |
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| 999 |
_c8663 _d8663 |
||